Superior® Perfluoroelastomer FFKM

• 486 (White)
  Superior 486 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 486 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.
• 508 (White)
  Superior 508 is specifically designed for high temperature applications. Superior 508 offers excellent plasma resistance and minimum particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.
• 298 (Violet)
  Superior 298 is specifically designed for high temperature plasma applications and has excellent chemical compatibility in wet environments. Superior 298 offers excellent plasma resistance and the lowest particulation and extractables in a wide range of plasma, acid, and solvent environments. See EKKSC Material Matrix for more details.
• 495 (Black)
  Superior 495 is a cost-effective, high performance compound for applications in wet chemistries. Superior 495 offers excellent acid resistance and low extractables. See EKKSC Material Matrix for more details.
• 498 (Black)
  Superior 498 is designed for high temperature wet chemistries/etch applications. Superior 498 offers excellent high temperature compression set resistance. See EKKSC Material Matrix for more details.
• 485 (Black)
  Superior 485 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 485 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EKKSC Material Matrix for more details.

Superior® FKM  (proprietary/patented cure system)

• F815 (Black Translucent)
  Superior F815 was specifically developed to be a cost-effective, high-performance compound for semiconductor applications. Superior F815 is an ultra-clean high Fluorine FKM with increased temperature resistance to 220° C, while offering outstanding plasma resistance and low particulation in a wide range of plasma environments.

Silicone VMQ

Fluorosilicone FVMQ

• F70

Hydrogenated Nitrile HNBR

Extreme FKM

• CV75 (White)
• CV75 (Black)

Fluoroelastomer FKM

• V75 (Black)
• V75 (White)